An air filled parallel plate electrostatic actuator is shown in the figure. The area of each capacitor plate is
100μm×100μm. The distance between the plates
d0=1μm when both the capacitor charge and spring restoring force are zero as shown in Figure (a). A linear spring of constant
k=0.01N/m is connected to the movable plate. When charge is supplied to the capacitor using a current source, the top plate moves as shown in Figure (b). The magnitude of minimum charge (Q) required to momentarily close the gap between the plates is _________
×10−14C (rounded off to two decimal places).
Note: Assume a full range of motion is possible for the top plate and there is no fringe capacitance. The permittivity of free space is
ϵ0=8.85×10−12F/m and relative permittivity of air (
ϵr) is 1.
